Wafer Inspection Software

Calibration Wafer Standard and absolute calibration standards for Tencor Surfscan, Hitachi and KLA-Tencor ...

A Contamination Wafer Standard is a NIST traceable, particle wafer standard with Size Certificate included, deposited with monodisperse silica nano-particles and narrow size peak between 30 nm and 2.5 microns to calibrate the size response curves of KLA-Tencor Surfscan SP3, SP5 SP5xp wafer inspection systems and Hitachi SEM and TEM systems. The Silica Contamination Wafer Standard is deposited as ...

EpiNet 2019 is a software for control, analysis and optimization of epitaxial processes in production and development of LEDs, laser diodes, VCSEL, HEMT, HBT and other electronic and optoelectronic devices. The software extracts key figures about wafers’ behavior during growth. In run-to-run control and in statistical process control, these key figures are used to improve yield and process ...